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M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers Revision:SEMI M34-0299 (Withdrawn 0211) - Withdrawn - Historical providing particle control as risk

SKU: 90632280786
4.1

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Description

providing particle control as risk mitigation for particle contamination on the wafer

This Practice includes preparation procedures that can be applied to components such as tubing

it is impossible for this publication to provide definite statements related to the safe handling of individual liquid chemicals

This Standard specifies the purpose

M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers Revision:SEMI M34-0299 (Withdrawn 0211) - Withdrawn - Historical providing particle control as risk

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