S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases Revision:SEMI S5-0703 - Superseded manufacture and purchase specifications for

manufacture and purchase specifications for CD-SEM magnification references conform to this Guide

SEMI E99-1104E (Reapproved 0710)

This Test Method is referred to as a preferred method of RF power measurement for conforming to SEMI E113

Both this Guide and JIS H 0609 emphasize the use of etching solutions that do not contain chromic acid

S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases Revision:SEMI S5-0703 - Superseded manufacture and purchase specifications forThe purpose of this Safety Guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases during transportation, storage, and use. This Safety Guideline pertains to FLDs for hazardous gases. These devices are intended to limit the flow rate of uncontrolled releases of gases at or downstream of the FLDs. This Safety Guideline pertains to FLDs operating at critical flow rates